Evaluation of top, angle, and side cleaned FIB samples for TEM analysis

Eduardo Montoya, Sara Bals, Marta D. Rossell, Dominique Schryvers, Gustaaf Van Tendeloo

Research output: Contribution to journalArticle

30 Scopus citations


TEM specimens of a LaAlO3/SrTiO3 multilayer are prepared by FIB with internal lift out. Using a Ga+1 beam of 5 kV, a final cleaning step yielding top, top-angle, side, and bottom-angle cleaning is performed. Different cleaning procedures, which can be easily implemented in a dual beam FIB system, are described and compared; all cleaning types produce thin lamellae, useful for HRTEM and HAADF-STEM work up to atomic resolution. However, the top cleaned lamellae are strongly affected by the curtain effect. Top-angle cleaned specimens show an amorphous layer of around 5 nm at the specimen surfaces, due to damage and redeposition. Furthermore, it is observed that the LaAlO3 layers are preferentially destroyed and transformed into amorphous material, during the thinning process. © 2007 Wiley-Liss, Inc.
Original languageAmerican English
Pages (from-to)1060-1071
Number of pages12
JournalMicroscopy Research and Technique
StatePublished - 1 Dec 2007
Externally publishedYes

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